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Ultra pure water system for semiconductor and packaging industries

Ultra pure water system for semiconductor and packaging industries

The resistivity of 18.25M Ω· cm is considered the optimal theoretical water quality indicator for ultrapure water. With the development of the microelectronics industry, using only this indicator to measure ultrapure water is far from enough. Particles in ultrapure water TOC、 Dissolved oxygen, silicon dioxide, bacteria, and other PPT grade metal ions have become the main factors affecting the quality and yield of products in the microelectronics industry and other industries.

Typical process flow in the semiconductor industry

 

ASTM Water Quality Standards for Ultra Pure Water in the Electronic Semiconductor Industry in the United States

Parameter

Type E-1

Type E-1.1

Type E-1.2

Linewidth(microns)

1.0-0.5

0.5-0.25

0.25-0.18

Resistivity,25℃

18.2

18.2

18.2

*Temperature

 

 

 

*Pressure

 

 

 

Endotoxin unit(EU/ml)

0.03

0.03

0.03

TOC(μg/L)

5

2

1

Dissolved oxygen(μg/L)

1

1

1

Residue after evaporation(μg/L)

1

0.5

0.1

SEM particles/L(micron range)

 

 

 

0.1-0.2

1000

1000

200

0.2-0.5

500

500

100

0.5-0.1

50

50

1

10

-

 

-

On-line particles/L(micron range)

 

 

 

Particles(>0.05micron)

 

 

 

0.05-0.1

500

500

100

0.1-0.2

300

300

50

0.2-0.3

50

50

20

0.3-0.5

20

20

10

>0.5

4

4

1

Bacteria/100 mL

 

 

 

100ml Sample

1

1

1

1L Sample

1

1

0.1

Silica

 

 

 

 

 

 

 

Silica-total(μg/L)

3

0.5

0.5

Silica-dissolved(μg/L)

1

0.1

0.05

lons and metals(μg/L)

 

 

 

Ammonium

0.1

0.10

0.05

Bromide

0.1

0.05

0.02

Chloride

0.1

0.05

0.02

Fluoride

0.1

0.05

0.03

Nitrate

0.1

0.05

0.02

Nitrite

0.1

0.05

0.02

Phosphate

0.1

0.05

0.02

Sulfate

0.1

0.05

0.02

Aluminum

0.05

0.02

0.005

Barium

0.05

0.02

0.001

Boron

0.05

0.02

0.005

Calcium

0.05

0.02

0.002

Chromium

0.05

0.02

0.002

Copper

0.05

0.02

0.002

Iron

0.05

0.02

0.002

Lead

0.05

0.02

0.005

Lithium

0.05

0.02

0.003

Magnesium

0.05

0.02

0.002

Manganese

0.05

0.02

0.002

Nicke

0.05

0.02

0.002

Potassium

0.05

0.02

0.005

Sodium

0.05

0.02

0.005

Strontium

0.05

0.02

0.001

Zinc

0.05

0.02

0.002

 

 

 

 

*Temperature and pressure values to be determined